Program

Open Poster Program

Program Open Poster Program

OPEN POSTER SESSION
OPEN POSTER SESSION
2019.01.30 (Wed) 13:15 – 15:15, Hall B2(1F)
OP-001

COMPRESSIVE RESPONSE OF PRISTINE AND SUPERCONDUCTOR COATED MWCNT PILLARS

A. M. Gheytaghi, S. Vollebregt, R.H. Poelma, H. V. Zeijl, and G. Q. Zhang
Delft University of Technology, NETHERLANDS
OP-002

HIGH-EFFICIENCY CARBON NANOTUBE THIN FILM HEATER FABRICATED VIA SUBSTRATE SHRINKAGE

Jeonhyeong Park, Soyun Kim, and Hoe Joon Kim
Daegu Gyeongbuk Institute of Science & Technology (DGIST), KOREA
OP-003

PZT THIN FILM FOR MEMS APPRICATIONS

Toshihiro Doi and Nobuyuki Soyama
Mitsubishi Materials Corporation Central Research Institute, JAPAN
OP-004

SIMPLE UV EXPOSURE SYSTEM USING TWO UV-LED ARRAYS VIA CHECKERBOARD HALF-MIRROR

Hidetoshi Takahashi 1, Isao Shimoyama 1, and Yun Jung Heo 2
1The University of Tokyo, JAPAN and
2Kyung Hee University, KOREA
OP-005

WAFER-LEVEL FABRICATION PROCESS FOR MICRO HEMISPHERICAL RESONATORS

Yan Shi, Wei Li, Kun Lu, Xiang Xi, YulieWu, Zhanqiang Hou, XuezhongWu, and Dingbang Xiao
National University of Defense Technology, CHINA
OP-006

FAST FABRICATION AND CHARACTERIZATION OF GLASS MICROFLUIDIC DEVICES PACKAGED USING FEMTOSECOND LASER BASED PROCESS

Jeongtae Kim 1,Sung-Il Kim 1, 2, Jaewon Park 3, Yeon-Ho Joung 1, Jiyeon Choi 2, and Chiwan Koo 1
1Hanbat National University, KOREA,
2Korea Institute of Machinery and Materials(KIMM), KOREA, and
3Southern University of Science and Technology, CHINA
OP-007

MICROFLUIDIC SYNTHESIS OF HOLLOW POLYMERIC NANOCAPSULES USING SELF-ASSEMBLY AND A PHOTO-CROSSLINKING PROCESS FOR OLED APPLICATION

Xuan Don Nguyen, Hyeong Jin Jeon, Dong Hyeok Park, Taeheon Lee, Hyun-jong Paik, and Jeong Sang Go
Pusan National University, KOREA
OP-008

ELECTRO-HYDRODYNAMIC DROPLET GENERATION, MANIPULATION, AND REPULSION OF OXIDIZED GALLIUM-BASED LIQUID METAL

Jinwon Jeong 1, Sang Kug Chung 1, Jeong-Bong Lee 2, and Daeyoung Kim 3
1Myongji University, KOREA,
2The University of Texas, Dallas, USA, and
3Korea Army Academy at Yeongcheon, KOREA
OP-009

INTEGRATED MICROFLUIDIC DEVICE FOR RAPID, ON-CHIP BLOOD PLASMA SEPARATION AND ANALYSIS

Suyeon Shin, Byeongyeon Kim, Yujin Lee, Yoon-jin Kim, and Sungyoung Choi
Kyung Hee University, KOREA
OP-010

MICROFLUIDIC MICROBIAL FUEL CELL WITH POROUS ELECTRODES

Cheon Ho Lee, Guitao Yang, No Hyeon Park, Taeseong Choi, Yoomin Ahn
Hanyang University, KOREA
OP-011

PRINTING OF CELL SUSPENSION USING CONTROLLED DROPLET IMPACT ON SUPERHYDROPHOBIC SIEVE

Chandantaru Dey Modak 1, Arvind Kumar 1,2, Abinash Tripathy 1,3, Choongyeop Lee 4, and Prosenjit Sen1
1Indian Institute of Science, INDIA,
2The University of Queensland, AUSTRALIA,
3ETH Zurich, SWITZERLAND, and
4Kyung Hee University, KOREA
OP-012

ONCHIP PARALLEL MEMS FTIR SPECTROMETERS ENABLING HIGH RESOLUTION ENVIRONMENTAL GAS SENSING

Alaa Fathy 3, Yasser M. Sabry 1, 2, Tarik Bourouina 3, and Diaa Khalil 1, 2
1Ain-Shams University, EGYPT,
2Si-Ware Systems, EGYPT, and
3Université Paris-Est, FRANCE
OP-013

DEVELOPMENT OF MINIATURE GAS CHROMATOGRAPHY ANALYZER FOR IN-SITU EXPLORATION OF PLANETARY ENVIRONMENTS USING MEMS TECHNOLOGY

Leïla Bouchra 1, Cyril Szopa 1, Arnaud Buch 2, Pascal Cardinael 3, Valérie Peulon-Agasse 3, David Coscia 1, Jean-Pierre Pineau 1, Vincent Guerini 1, Tarik Bourouina 4
1Versailles-Saint-Quentin University, FRANCE,
2Ecole Centrale, Paris, FRANCE,
3Rouen Normandie University, FRANCE, and
4ESIEE Paris, FRANCE
OP-014

MONOLITHIC INTEGRATED CMOS-MEMS FLUORESCENCE QUENCHING GAS SENSOR AND RESISTIVE TEMPERATURE DETECTOR (RTD) FOR TEMPERATURE COMPENSATION

Ya-Chu Lee, Da-Jeng Yao, and Weileun Fang
Nation Tsing Hua University, TAIWAN
OP-015

ZnO NANOWIRE GAS SENSOR USING HYDRO-THERMAL SYNTHESIS METHOD

Myung Gyu Shin, Young Jung, Dong Hwan Kim and Jong Soo Ko
Pusan National University, KOREA
OP-016

HIGH PERFORMANCE HYDROGEN GAS SENSOR FOR ROOM-TEMPERATURE OPERATION BASED ON SILICON MICROCHANNEL TREATED WITH METAL-ASSISTED CHEMICAL ETCHING COMBINED WITH THERMALLY ANNEALED PALLADIUM NANOISLANDS

Hyeonggyun Kim 1, Min Gao 1, 2, and Inkyu Park1
1Korea Advanced Institute of Science and Technology (KAIST), KOREA and
2École Polytechnique Fédérale de Lausanne(EPFL), SWITZERLAND
OP-017

MICRO-POROUS FILTER COATED WITH FUNCTIONAL MATERIALS FOR IMPROVEMENT OF GAS SELECTIVITY AND MOISTURE STABILITY OF METAL OXIDE GAS SENSORS

Kyoungjin Hwang, Incheol Cho, Kyungnam Kang, and Inkyu Park
Korea Advanced Institute of Science and Technology (KAIST), KOREA
OP-018

INKJET PRINTED REDUCED GRAPHENE OXIDE HYDROGEN SENSOR BASED ON 3D POROUS PAPER MICROFIBERS

Jianxiong Zhu, Minkyu Cho, Jaeho Park, and Inkyu Park
Korea Advanced Institute of Science and Technology (KAIST), KOREA
OP-019

A MICRO-HOTPLATE FOR MEMS-BASED H2S SENSOR

Gaoqiang Niu, Changhui Zhao, and Fei Wang
Southern University of Science and Technology (SUSTech), CHINA
OP-020

COMPUTATIONAL STUDY ON THE PARTICLE PATH BY THERMOPHORETIC FORCE FOR DUST SENSORS

Se Yong Park, Jun Hyeong Kim, and Hee Chul Lee
Korea Polytechnic University, KOREA
OP-021

A SINGLE-CELL IMPEDANCE MICRO-CYTOMETER FEATURING 3D DIFFERENTIAL MICROELECTRODES MADE OF SILVER PDMS

Ziheng Liang, Duli Yu, and Xiaoxing Xing
Beijing University of Chemical Technology(BUCT), CHINA
OP-022

PLATINUM NANO-FLOWER ON HIERACHICAL MICROELECTRODE ARRAY FOR BIOCHEMICAL SENSING

Qi Zeng1 and TianzhunWu 1, 2
1Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, CHINA and
2Shenzhen CAS-Envision Medical Technology Co. Ltd, Shenzhen, CHINA
OP-023

PEG-DA FABRICATION FOR MICROSTRUCTURES THROUGH TWO PHOTON POLYMERIZATION

Pei-Hsuan Wang, Wei-Li Huang, Wei-Hsin Chang, Tien-Tung Chung, and Yen-Wen Lu
National Taiwan University, TAIWAN
OP-024

BIO-INSPIRED HOLLOW PDMS SPONGE FOR ENHANCED OIL–WATER SEPARATION

Dong Hyun Kim, Dong Woo Lee, Jong Min Beak, Jung Oh An, and Jung Hwal Shin
Kyungnam University, KOREA
OP-025

MULTIDEPTH CIRCULAR MICROCHANNELS FOR ATERIAL THROMBOSIS ON-A-CHIP

Thanh-Qua Nguyen 1, 2, Sang-Youp Lee 2, 3, and Woo-Tae Park 1
1Seoul National University of Science and Technology, KOREA,
2Korea Institute of Science and Technology(KIST), KOREA, and
3University of Science and Technology, KOREA
OP-026

THE FABRICATION OF PDMS SPONGE USING 3D PRINTING

Hee Do Eom, Dong Woo Lee, Dong Hyun Kim, Jung Oh An, Jung Hwal Shin
Kyungnam University, KOREA
OP-027

ALL-PDMS CYTOMETER CHIP WITH EMBEDDED FIBER WAVEGUIDE AND OPTIMIZED 3D HYDRODYNAMIC FOCUSING

Masahiro Motosuke, Reiya Ono, Kosuke Shigeta, and Ken Yamamoto
Tokyo University of Science, JAPAN
OP-028

BIOMOLECULE MANIPULATION USING GIGAHERTZ BULK ACOUSTIC WAVES FOR ENHANCED PROTEIN SENSING

Xuexin Duan, Shuting Pan, and Xian Chen
Tianjin University, CHINA
OP-029

3D-PRINTED POINT-OF-CARE TESTING DEVICE FOR HEAVY METAL ION DETECTION BY ROLLING CIRCLE AMPLIFICATION AND COLORIMETRIC ANALYSIS

Ji Won Lim 1, Tai-yong Kim 2, and Min-ah Woo 1
1Korea Food Research Institute(KFRI), KOREA and
2Chonbuk National University, KOREA
OP-030

DIFFERENTIATION OF ALZHEIMER'S DISEASE BY BEAD-BASED ELECTROCHEMICAL IMPEDANCE SENSOR (BEIS)

Kyeong-Sik Shin, Miso Kim ,Soumi Roy, Minjun Park, and Ji Yoon Kang
Korea Institute of Science Technology(KIST), KOREA
OP-031

A MICROFLUIDIC INTERCONNECTION CABLE DELIVERING PHARMACEUTICAL DRUGS TO NEURAL ELECTRODES

YooNa Kang, and Sohee Kim
Daegu Gyeongbuk Institute of Science & Technology (DGIST), KOREA
OP-032

IMPLANTABLE WIRELESS NEURAL INTERFACE FOR MULTICHANNEL NEURAL RECORDING AND BI-COLOR OPTOGENETIC NEUROMODULATION

Daeho Ryu 1, Saeyeong Jeon 1, Sang Beom Jun 1, Yong-Kweon Kim 1, and Chang-Hyeon Ji 2
1Seoul National University, KOREA and
2Ewha Woman's University, KOREA
OP-033

ULTRAMINIATURIZED, WIRELESSLY POWERED NEURAL DEVICE FOR REMOTE DRUG DELIVERY AND PHOTOSTIMULATION

Raza Qazi 1, 2, Kyung Nim Noh 3, Sung Il Park 4, Zhanan Zou 2, Aaron D. Mickle 5, Jose G. Grajales-Reyes 5, Kyung-In Jang 6, Robert W. Gereau IV 5, Jianliang Xiao 2, John A. Rogers 7, and Jae-Woong Jeong 1
1Korea Advanced Institute of Science and Technology(KAIST), KOREA,
2University of Colorado, Boulder, USA,
3University of Illinois, Urbana-Champaign, USA,
4Texas A&M University, USA,
5Washington University in St. Louis, USA,
6Daegu Gyeongbuk Institute of Science & Technology (DGIST), KOREA, and
7Northwestern University, USA
OP-034

A BATTERY-POWERED HAND-HELD REALTIME MICROFLUIDIC POLYMERASE CHAIN REACTION (PCR) AMPLIFICATION DEVICE

Dae-Sik Lee 1, Ok Ran Choi 2, and YuJin Seo 2
1Electronics & Telecommunications Research Institute (ETRI), KOREA and
2Genesystem Co., KOREA
OP-036

SIMPLE ALIGNMENT METHOD OF AGNWS CONTROLLING TEMPERATURE AND WITHDRAWAL SPEED OF DIP-COATING

Jae Hyuk Choi, Myung Gyu Shin, Dong Hwa Kwak, and Jong Soo Ko
Pusan National University, KOREA
OP-037

MODIFYING QUARTZ TUNING FORKS FOR SHEAR FORCE MICROSCOPY AND HUMIDITY SENSING

Juhee Ko 1, Amun Jarzembski 2, Yeowon Yoon 3, Keunhan Park 2, Bongjae Lee 4, and Jungchul Lee 4
1Sogang University, KOREA,
2University of Utah, USA,
3Korea Institute of Science and Technology(KIST), KOREA, and
4Korea Advanced Institute of Science and Technology(KAIST), KOREA
OP-038

A NOVEL CROSS-LINKED CANTILEVER BASED PIEZOELECTRIC THREE-AXIS MEMS MAGNETIC SENSOR FABRICATED BY MULTIPLE WET ETCHING PROCESSES

Hao Duan and Tien-Kan Chung
National Chiao Tung University, TAIWAN
OP-039

COMPACT MODEL OF A MICRO ACCELEROMETER WITH PZR NANO-GAUGE SENSING ELEMENT

Arnaud Parent 1, C. J. Welham 1, C. Dufour 1, S. Rouvillois 1, S. Louwers 2, P. Rey 2, T. Verdot 2
1Coventor, FRANCE and
2CEA-LETI, FRANCE
OP-040

NONLINEARITY REDUCTION IN DISK RESONATOR GYROSCOPES FOR SENSITIVITY AND BIAS STABILITY IMPROVEMENT

Qingsong Li, Fenlan Ou, Dingbang Xiao, Xin Zhou, Yongmeng Zhang, Yi Xu, and Xuezhong Wu
National University of Defense Technology, CHINA
OP-041

THE IMPACT OF PARTICLE MATERIALS AND ACCUMULATION RATES ON MEASUREMENT SENSITIVITY OF QUARTZ CRYSTAL MICROBALANCE (QCM) FINE DUST SENSOR

Il Ryu Jang 1, Jeong Yeon Seo 1, Sang Bok Kim 2, and Hoe Joon Kim1
1Daegu Gyeongbuk Institute of Science & Technology (DGIST), KOREA and
2Korea Institute of Machinerty & Materials (KIMM), KOREA
OP-042

GIANT PIEZORESISTIVE EFFECTS OF SILICON NANOWIRE: A NOVEL ANALYTICAL MODEL WITH APPLICATIONS TO INERTIAL SENSORS

Seohyeong Jang 1, Bobaro Chang 1, Jinwoo Sung 1, Taeyup Kim 1, Seunghyun Lee 1, Hyoungho Ko 2, and Dong-il “Dan” Cho 1
1Seoul National University, KOREA and
2Chungnam National University, KOREA
OP-043

LARGE ARRAY OF COUPLED MICRORESONATORS

Guowei Tao 1 and Bhaskar Choubbey 2
1University of Oxford, UK
2Siegen University, GERMANY
OP-044

STEEL BLOCK EMBEDDED TEMPERATURE SENSORS FOR SURFACE HEAT FLUX DISTRIBUTION OF WATER JET COOLING

Hyo Chang Cho, Bo Wang, Sung Hoon Kim, and Jeong Sang Go
Pusan National University, KOREA
OP-045

MICRO-CORIOLIS MASS FLOW SENSOR WITH RESISTIVE READOUT

Thomas Victor Paul Schut, Remco J Wiegerink, and Joost C Lötters
University of Twente, NETHERLANDS
OP-046

A MEMS VISCOMETER USING A PRESSURE SENSOR WITH A SUPEROLEOPHOBIC MEMBRANE

Thanh-Vinh Nguyen and Isao Shimoyama
The University of Tokyo, JAPAN
OP-047

CONTRACTILE FORCE MEASUREMENT OF ORIENTATIONALLY CONTROLLED IPS CELL-DERIVED CARDIOMYOCYTES

Kazunori Kihara, Kenei Matsudaira, Kayoko Hirayama, Takuya Tsukagoshi, Tomoyuki Takahata, and Isao Shimoyama
The University of Tokyo, JAPAN
OP-048

RAPID ON-DEMAND DRAWING OF HIGH ASPECT-RATIO, MICROSPHERE-TIPPED ELASTOMERIC MICROPILLARS FOR SAFE OPTICAL TACTILE SENSING

Qiang Li, Rabin Dhakal, and Jaeyoun (Jay) Kim
Iowa State University, USA
OP-049

AN LC PASSIVE WIRELESS HUMIDITY AND PRESSURE SENSOR BASED ON A NOVEL DUAL-RESONANT CIRCUIT

Wen-Jun Deng, Li-Feng Wang, Lei Dong, and Qing-An Huang
Southeast University, CHINA
OP-050

A TUNABLE CAPACITOR DRIVEN BY LIQUID DIELECTROPHORESIS (L-DEP)

Wen-Bo Li and Sung Kwon Cho
University of Pittsburgh, USA
OP-051

ENHANCING THE CURRENT STATE OF AlN CONTOUR-MODE RESONATORS BY DAMPING REDUCTION

Soon In Jung, Chaehyun Ryu, and Hoe Joon Kim
Daegu Gyeongbuk Institute of Science & Technology (DGIST), KOREA
OP-052

MEMS ENABLED MINIATURISATION OF PHOTOACOUSTIC SYSTEMS

Jonas Kusch, Gordon M.H. Flockhart, Ralf Bauer, and Deepak Uttamchandani
University of Strathclyde, UK
OP-053

CONCENTRATION SENSOR USING ELECTRIC MEASUREMENT OF SURFACE PLASMON RESONANCE

Seiji Hirano 1, Takuya Tsukagoshi 1, Kentaro Noda 1, Tomoyuki Takahata 1, Tetsuo Kan 2, and Isao Shimoyama 1
1The University of Tokyo, JAPAN and
2The University of Electro-Communications, JAPAN
OP-054

STRUCTURE-BASED LARGE HARD-SPRING TORSIONAL RESONATOR COUPLED WITH THERMAL BENDING FOR INFRARED SENSOR

Masaki Okamoto, Tomoya Hatagaki, Shinya Kumagai, and Minoru Sasaki
Toyota Technological Institute, JAPAN
OP-055

PIEZOELECTRIC THIN FILM PROCESSING FOR HIGH-PERFORMANCE PIEZO-MEMS MANUFACTURING

Yao Chih Hsieh, Hiroki Kobayashi, Tatsuro Tsuyuki, Isao Kimura, Takehito Jimbo, and Koukou Suu
ULVAC, Inc., JAPAN
OP-056

NOVEL WEARABLE TRIBOELECTRIC GENERATOR BASED ON A HYBRID MIX OF CARBON NANOTUBE AND NATURAL POLYMER

Meng Su 1, 2, Jürgen Brugger 2, and Beomjoon Kim 1
1 The University of Tokyo, JAPAN and
2 École Polytechnique Fédérale de Lausanne (EPFL), SWITZERLAND
OP-057

FLEXIBLE AND STRETCHABLE ENERGY HARVESTER BASED ON LIQUID-METAL GALLIUM ALLOY

Jianbing Xie 1, Yiwei Wang 1, Rong Dong 2, and Kai Tao 1
1Northwestern Polytechnical University, CHINA and
2Xi'an Technological University, CHINA
OP-058

A TRIBOELECTRIC POWER AMPLIFIER USING THE PRINCIPLE OF LIGHTNING ROD

Jinghyoung Park, Maeum Han, Hongseok Jang, Young Jung, and Hanchul Cho
Korea Institute of Industrial Technology, KOREA
OP-059

ELECTRIC-INSPIRED FLEXIBLE ELECTROCHEMICAL FILM POWER SUPPLY FOR LONG-TIME USE EPIDERMAL SENSORS

Zhihua Pu, Jiaming Ma, Chao Fang, Haixia Yu, and Dachao Li
Tianjin University, CHINA
OP-060

A CONTINUOUS AND WEARABLE BLOOD PRESSURE MEASUREMENT DEVICE WITH MEMS 3-AXIS FORCE SENSOR ARRAY

Tetsuji Dohi 1, Hisasi Urata 1, Shun Fukahori 1, Masataka Hori 1, Akihito Nakai 2, and Hiroyuki Nakamura 3
1Chuo university, JAPAN,
2The University of Tokyo, JAPAN, and
3Shinano Kenshi Co., Ltd., JAPAN
OP-061

ROLE OF THE GRAPHIC DESIGN IN MEMS

Akiko Sato
The University of Tokyo, JAPAN