Authors/Abstracts

Abstract Classification

Authors/Abstracts Abstract Classification

  1. 01

    Materials, Fabrication and Packaging for Generic MEMS & NEMS

    • Materials for MEMS & NEMS
    • Generic MEMS & NEMS Manufacturing Techniques
    • Packaging & Assembly
  2. 02

    Micro/Nanofluidics & Chemical Sensors

    • Materials and Manufacturing for Micro- and Nanofluidics
    • Generic Microfluidics & Nanofluidics
    • Biological and Medical Microfluidics and Nanofluidics
    • Integrated/Embedded Microfluidics and Nanofluidic Systems & Platforms
    • MEMS Gas and Chemical Sensors
    • Other Micro- and Nanofluidics
  3. 03

    Bio & Medical MEMS

    • Materials for Bio- and Medical MEMS
    • Manufacturing for Bio- & Medical MEMS & Microfluidics
    • Nanobiotechnology
    • Biosensors and Bioreactors
    • Biofabrication/Tissue on a chip
    • Medical Microsystems (Probes, Implantables, Minimally Invasive, Etc.)
    • Other Bio and Medical MEMS
  4. 04

    MEMS Physical Sensors

    • Materials for Physical Sensors
    • Manufacturing Techniques for Physical Sensors
    • Nanoscale Physical Sensors
    • Inertial Sensors (Gyros, Accelerometers, Resonators, Etc.)
    • Fluidic Sensors (Flow, Pressure, Density, Viscosity, Etc.)
    • Sonic & Ultrasonic MEMS Transducers (Microphones, PMUTs, Etc.)
    • Force & Displacement Sensors (Tactile, Force, Torque, Stress & Strain Sensor)
    • Other Physical Sensors
  5. 05

    MEMS for Electromagnetics

    • Materials and Manufacturing for Electromagnetic Transducers
    • RF MEMS Components & Systems
    • MEMS for Timing & Frequency Control
    • THz MEMS Components & Systems
    • Photonic Components & Systems
    • Free Space Optical Components & Systems (Displays, Lenses, Detectors)
    • Other Electromagnetic MEMS
  6. 06

    MEMS Actuators & Power MEMS

    • Materials and Manufacturing for Actuators & Power MEMS
    • Actuator Components & Systems
    • Power MEMS Components & Systems
    • Other Actuators & Power MEMS
  7. 07

    MEMS Products

    • Innovations in MEMS Products
    • Calibration and Measurement Methods for MEMS Products
    • Emerging MEMS Products
    • Other MEMS Products